HEX Deposition System

Hex Deposition System

Located in NANO N116, the Mantis Deposition Inc. Hex Deposition system is one of the facility's thin film deposition systems. The HEX is a unique, compact, and highly flexible benchtop deposition system that combines a sputtering source and an E-beam source for metals with a thermal evaporator for polymers and an organic evaporator for organic materials. The Hex allows for any of the three deposition techniques to be used simultaneously.

• The sample stage holds up to 4-inch wafers and can rotate up to 20 RPM
• 2 in diameter sputtering source for magnetic or nonmagnetic material
• A single pocket mini E-beam evaporator where material can be deposited from either rod or crucible
• A single thermal boat source allows for the integration of a range of thermal boats for the deposition of both metals and organics/polymers
• A new ORCA source is specifically designed for highly controlled deposition of organic material at low temperatures
• The system pumps down fast; the pressure reaches 5.0 x 10^-6 mbar in just 30 minutes
• The ultimate base pressure is 4 x10^-7 mbar